| X-axis Max Stroke | 500 mm |
| Y-axis Max Stroke | 300 mm |
| Z-axis Max Stroke | 300 mm |
| XYZ Module Precision Class | C5 |
| Position Precision | ±0.04 mm |
| Repeat Precision | ±0.01 mm |
| Max Speed | 500 mm/s |
| Power Supply | 1servo motor |
| R-axis Rotation Range | 360° |
| R-axis Rotation Speed | 3000 RPM |
| Power Demand | Single-phase AC 110V-380V/50-60Hz |
| Equipment Power | 2 Kw |
| Covers Area | 1.5m*1.0m |
| Weight | 200 Kg |
| Work Temperature | 0-40℃ |
| Work Huimity | 10-75% |
| Enviroment Requirment | No vibration, No interference source, Keep Ventilation |
| Optional Fixture Tools | Purer Water, Argon |
